油液环境下的电液伺服阀用压电双晶片执行器复合阻尼控制

彭洪涛; 张允执; 凌杰; 张文星; 康佳豪; 朱玉川

doi:10.13224/j.cnki.jasp.20250108

油液环境下的电液伺服阀用压电双晶片执行器复合阻尼控制

doi: 10.13224/j.cnki.jasp.20250108

1.
南京航空航天大学机电学院，南京 210016
2.
中国航空工业集团公司西安飞行自动控制研究所，西安 710065

基金项目: 航空科学基金（20220007052001）

详细信息

作者简介:
彭洪涛（1999-），男，硕士生，主要研究方向为压电精密驱动。E-mail：sz2205097@nuaa.edu.cn

通讯作者:
凌杰（1990-），男，副教授，博士，主要研究方向为精密驱动与控制。E-mail：meejling@nuaa.edu.cn

中图分类号: V231；TP273
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出版历程
- 收稿日期: 2025-03-05
- 网络出版日期: 2025-06-29

Damping control of piezoelectric bimorph actuators for electrohydraulic servo valves in oil environments

1.
College of Mechanical and Electrical Engineering，Nanjing University of Aeronautics and Astronautics，Nanjing 210016，China
2.
Xi’an Flight Automatic Control Research Institute，Aviation Industry Corporation of China，Limited，Xi’an 710065，China

摘要

摘要:
针对电液伺服阀用压电双晶片执行器在油液环境下的控制问题，提出了复合阻尼控制策略。对于100 Hz以下的低频段，采用基于逆乘法的前馈补偿策略，并结合干扰观测器反馈控制，以提高系统的鲁棒性。实验结果表明：在1 Hz频率下，方均根（RMS）误差由1.76 μm降低至0.83 μm，而在100 Hz频率下，由3.44 μm降低至2.17 μm。针对500～700 Hz的高频段，提出了融合干扰观测和正速度和位置反馈（PVPF）阻尼控制的复合控制策略，并与传统比例-积分-微分（PID）、前馈（FF）+干扰观测器（DOB）及FF+PVPF控制方法进行比较。结果表明：复合控制策略能有效补偿液动力干扰，抑制一阶固有频率附近的轻阻尼特性，使得不同工况下谐波跟踪的方均根误差均保持在2.5 μm以下，显著提升了系统的高频跟踪能力。研究为压电双晶片执行器在高精度电液伺服系统中的应用提供了新的控制方法和实验验证。
- 油液环境 /
- 电液伺服阀 /
- 压电双晶片 /
- 阻尼控制 /
- 抗干扰控制
Abstract:
A composite damping control strategy was proposed to address the control challenges of piezoelectric bimorph actuators for electrohydraulic servo valves in oil environments. For the low-frequency range below 100 Hz, a feedforward compensation strategy based on inverse multiplication was adopted, combined with a feedback controller using a disturbance observer to enhance the system robustness. Experimental results showed that at 1 Hz, the root mean square (RMS) error was reduced from 1.76 μm to 0.83 μm, and at 100 Hz, it was reduced from 3.44 μm to 2.17 μm. For the high-frequency range of 500—700 Hz, a composite strategy based on positive velocity and position feedback (PVPF) damping control was proposed and compared with traditional proportional-integral-derivative (PID), feed-forward (FF)+disturbance observer (DOB), and FF+PVPF control methods. The results demonstrated that the composite control strategy effectively compensated for hydrodynamic disturbances and suppressed the lightly damped characteristics near the first natural frequency, maintaining RMS tracking errors below 2.5 μm under various operating conditions. This study could provide a novel control approach and experimental validation for the application of piezoelectric bimorph actuators in high-precision electrohydraulic servo systems.
- oil environments /
- electrohydraulic servo valve /
- piezoelectric bimorph /
- damping control /
- anti-interference control

HTML

图 1 压电双晶片-反馈杆组件构型

Figure 1. Piezoelectric bimorph-feedback rod assembly configuration

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图 2 压电双晶片-反馈杆组件控制策略验证实验平台

Figure 2. Experimental platform for validating the control strategy of piezoelectric bimorph-feedback rod assembly

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图 3 迟滞非线性前馈补偿与级联结构

Figure 3. Hysteresis nonlinearity feedforward compensation and cascaded structure

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图 4 逆乘结构前馈补偿示意图

Figure 4. Schematic diagram of inverse multiplicative feedforward compensation

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图 5 低频作动干扰观测与控制的控制框图

Figure 5. Control block diagram of low-frequency actuation disturbance observation and control

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图 6 干扰观测器输入项与干扰项幅频响应

Figure 6. Amplitude-frequency response of disturbance observer input and disturbance terms

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图 7 高频作动阻尼控制的控制框图

Figure 7. Control block diagram of high-frequency actuation damping control

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图 8 开环与PVPF阶跃仿真结果

Figure 8. Open-loop and PVPF step simulation results

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图 9 前馈补偿实验结果

Figure 9. Feedforward compensation test results

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图 10 低频作动控制实验结果

Figure 10. Low-frequency actuation control test results

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图 11 不同阻尼环境下开环实验结果

Figure 11. Open-loop test results under different damping environments

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图 12 PID谐波跟踪实验结果

Figure 12. PID harmonic tracking test results

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图 13 FF+DOB谐波跟踪实验结果

Figure 13. FF+DOB harmonic tracking test result

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图 14 FF+PVPF、FF+PVPF+DOB谐波跟踪实验结果

Figure 14. FF+PVPF, FF+PVPF+DOB harmonic tracking test result

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表 1 高频作动控制实验误差统计表

Table 1. High-frequency actuator control experiment error statistics table

频率/Hz	PID跟踪误差（非浸油）/μm	FF+DOB跟踪误差（非浸油）/μm	FF+PVPF跟踪误差/μm			FF+PVPF+DOB跟踪误差/μm
频率/Hz	PID跟踪误差（非浸油）/μm	FF+DOB跟踪误差（非浸油）/μm	非浸油	液压油	硅酮油	非浸油	液压油	硅酮油
500	18.93	5.34	1.41	2.67	4.00	1.99	1.98	2.36
600	19.32	6.08	1.61	2.81	4.05	2.23	1.94	2.18
700	26.79	6.87	1.45	3.34	4.49	1.46	1.66	2.43

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