Influence of gas-solid thermal coupling on micro-vibration of aerostatic bearing at micron scale

Based on gas lubrication theory and rarefied gas dynamics, and in combination with boundary slip and gas-solid thermal coupling analysis technology, the influence of local deformation of gas film on the gas-vortex and micro-vibration caused by temperature effect was studied. The research results show that: the maximum deformation variable of the gas film increases linearly with the temperature rise, considering that the gas-vortex movement velocity of thermal coupling is significantly smaller than the traditional numerical analysis method, under the coupling conditions, different operating temperatures have varied impact on the micro-vibration of the aerostatic bearing. With the increase of temperature, the micro-vibration intensity decreases, but the temperature increase does not change its natural frequency, and different gas environment influences the movement velocity and micro-vibration intensity of the gas-vortex, of which the molecular number plays a major role. The effect of environmental factors should be taken into account in the actual work process to reduce the micro-vibration.