Volume 36 Issue 6
Jun.  2021
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Article Navigation >  Journal of Aerospace Power  > 2021  >  36(6): 1188-1196
PAN Muxuan, LIU Yanglin, LI Yu. A combined temperature-compensation approach to silicon piezoresistance pressure sensor[J]. Journal of Aerospace Power, 2021, 36(6): 1188-1196. doi: 10.13224/j.cnki.jasp.2021.06.007
Citation: PAN Muxuan, LIU Yanglin, LI Yu. A combined temperature-compensation approach to silicon piezoresistance pressure sensor[J]. Journal of Aerospace Power, 2021, 36(6): 1188-1196. doi: 10.13224/j.cnki.jasp.2021.06.007
shu

A combined temperature-compensation approach to silicon piezoresistance pressure sensor

doi: 10.13224/j.cnki.jasp.2021.06.007
  • 1.

    College of Energy and Power Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China

  • 2.

    Aero Engine Control System Institute,Aero Engine Corporation of China,Wuxi Jiangsu 214063,China

  • Received Date: 2020-09-18
  • Publish Date: 2021-06-28
    Abstract
  • A combined temperature-compensation approach to silicon piezoresistance pressure sensors was proposed. The fitting method was adopted to identify the transformation function of pressure sensors at different temperatures. The linear interpolation was employed to achieve the temperature-compensated coefficients of transformation functions. The pressure sensor signal processing module was designed. The simulations on the pressure signal processing with combined temperature-compensation were conducted. The simulation results showed that the pressure measurement accuracy was less than 0.1%, the temperature measurement time was around 10 μs, and the few on-chip resources were consumed. The temperature-compensation approach could meet the measurement requirements of compressor outlet pressure.

     

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