| Citation: | HUANG Zhiping, WU Yuying, WANG Wenbin, et al. Thermal analysis of a solenoid coil MEMS permanent-magnet motor[J]. Journal of Aerospace Power, 2023, 38（10）：2383-2394 doi: 10.13224/j.cnki.jasp.20210678
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A thermal analysis of a solenoid coil type MEMS permanent-magnet motor was conducted, and the preliminary temperature measurement plan was given. The overall design scheme of this MEMS permanent-magnet motor was introduced. The windings with silicon dioxide insulation inside the single crystal silicon substrate were selected to achieve the purpose of excellent heat dissipation performance. The thermal-structural coupling simulation was carried out by using the steady-state heat transfer and static structure mechanics modules of ANSYS. On this basis, it was verified by numerical simulation that the temperature distribution of the motor stator was uniform, and the winding and the substrate without temperature gradient can be considered. Through thermal-structural coupling simulation, it was concluded that the maximum operating temperature without expansion mismatch was 86 ℃ and the corresponding maximum heat loss power was 2.83 W. Based on this, the rated operating performance of the motor was estimated, and the temperature tolerance capacity and high power density potential of the motor were verified. The rated output power of the final design was 0.362 W, and the calculated design power density was 0.117 W/g.
| [1] |
TAI Y C, FAN L S, MULLER R S. IC-processed micro-motors: design, technology, and testing[C]//Proceedings of IEEE micro electro mechanical systems: an investigation of micro structures, sensors, actuators, machines and robots. Piscataway, US: IEEE, 2002: 1-6.
|
| [2] |
FRECHETTE L G, NAGLE S F, GHODSSI R, et al. An electrostatic induction micromotor supported on gas-lubricated bearings[C]//Technical Digest: MEMS 2001 14th IEEE International Conference on Micro Electro Mechanical Systems. Piscataway, US: IEEE, 2002: 290-293.
|
| [3] |
GHALICHECHIAN N,MODAFE A,LANG J H,et al. Dynamic characterization of a linear electrostatic micromotor supported on microball bearings[J]. Sensors and Actuators A: Physical,2007,136(2): 496-503. doi: 10.1016/j.sna.2006.08.019
|
| [4] |
LIVERMORE C,FORTE A R,LYSZCZARZ T,et al. A high-power MEMS electric induction motor[J]. Journal of Microelectromechanical Systems,2004,13(3): 465-471. doi: 10.1109/JMEMS.2004.828736
|
| [5] |
KOSER H,LANG J H. Magnetic induction micromachine: Part Ⅰ design and analysis[J]. Journal of Microelectromechanical Systems,2006,15(2): 415-426. doi: 10.1109/JMEMS.2006.872238
|
| [6] |
MORITA T,KUROSAWA M K,HIGUCHI T. A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer)[J]. Sensors and Actuators A: Physical,2000,83(1/2/3): 225-230.
|
| [7] |
KHOO T F,DANG D H,FRIEND J,et al. Triple degree-of-freedom piezoelectric ultrasonic micromotor via flexural-axial coupled vibration[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,2009,56(8): 1716-1724. doi: 10.1109/TUFFC.2009.1236
|
| [8] |
ZHAO Yanqiang,YUAN Songmei,CHU Xiangcheng,et al. Ultrasonic micro-motor with multilayer piezoelectric ceramic and chamfered driving tips[J]. The Review of Scientific Instruments,2016,87(9): 095108. doi: 10.1063/1.4963662
|
| [9] |
AHN C H,KIM Y J,ALLEN M G. A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils[J]. Journal of Microelectromechanical Systems,1993,2(4): 165-173. doi: 10.1109/84.273093
|
| [10] |
CUGAT O,DELAMARE J,REYNE G. Magnetic micro-actuators and systems (MAGMAS)[J]. IEEE Transactions on Magnetics,2003,39(6): 3607-3612. doi: 10.1109/TMAG.2003.816763
|
| [11] |
NIENHAUS M,EHRFELD W,STOELTING H D,et al. Design and realization of a penny-shaped micromotor[J]. The International Society for Optical Engineering,1999,3680: 592-600.
|
| [12] |
CUGAT O,REYNE G,DELAMARE J,et al. Novel magnetic micro-actuators and systems (MAGMAS) using permanent magnets[J]. Sensors and Actuators A: Physical,2006,129(1/2): 265-269.
|
| [13] |
MERZAGHI S, KOECHLI C, PERRIARD Y. Development of a hybrid MEMS BLDC micromotor[C]//2009 IEEE Energy Conversion Congress and Exposition. Piscataway, US: IEEE, 2009: 3595-3601.
|
| [14] |
DING Xiaofeng,LIU Guanliang,ZUO Zongyu,et al. Improved differential-evolution based optimization design of an axial flux MEMS micromotor[J]. International Journal of Applied Electromagnetics and Mechanics,2017,53(4): 645-661. doi: 10.3233/JAE-160035
|
| [15] |
OHNMACHT M,SEIDEMANN V,BÜTTGENBACH S. Microcoils and microrelays: an optimized multilayer fabrication process[J]. Sensors and Actuators A: Physical,2000,83(1/2/3): 124-129.
|
| [16] |
KLEIN M J K,ONO T,ESASHI M,et al. Process for the fabrication of hollow core solenoidal microcoils in borosilicate glass[J]. Journal of Micromechanics and Microengineering,2008,18(7): 075002. doi: 10.1088/0960-1317/18/7/075002
|
| [17] |
HERRAULT F, YORISH S, CRITTENDEN T, et al. Microfabricated, ultra-dense, three-dimensional metal coils[C]//TRANSDUCERS 2009: 2009 International Solid-State Sensors, Actuators and Microsystems Conference. Piscataway, US: IEEE, 2009: 1718-1721.
|
| [18] |
LU Zhiqiu,POLETKIN K,WALLRABE U,et al. Performance characterization of micromachined inductive suspensions based on 3D wire-bonded microcoils[J]. Micromachines,2014,5(4): 1469-1484. doi: 10.3390/mi5041469
|
| [19] |
MOAZENZADEH A,SUÁREZ SANDOVAL F,SPENGLER N,et al. 3-D microtransformers for DC–DC on-chip power conversion[J]. IEEE Transactions on Power Electronics,2015,30(9): 5088-5102. doi: 10.1109/TPEL.2014.2368252
|
| [20] |
GAO Xiaoyu,CAO Ying,ZHOU Yong,et al. Fabrication of solenoid-type inductor with electroplated NiFe magnetic core[J]. Journal of Magnetism and Magnetic Materials,2006,305(1): 207-211. doi: 10.1016/j.jmmm.2005.12.014
|
| [21] |
LEE D W,HWANG K P,WANG S X. Fabrication and analysis of high-performance integrated solenoid inductor with magnetic core[J]. IEEE Transactions on Magnetics,2008,44(11): 4089-4095. doi: 10.1109/TMAG.2008.2003398
|
| [22] |
XU Tiantong,SUN Jiamian,WU Hanxiao,et al. 3D MEMS in-chip solenoid inductor with high inductance density for power MEMS device[J]. IEEE Electron Device Letters,2019,40(11): 1816-1819. doi: 10.1109/LED.2019.2941003
|
| [23] |
王红宇,苏鹏声,王祥珩. 采用热路方法和三维有限元方法计算三峡水轮发电机三维热网络热阻参数的研究[J]. 大电机技术,2007(1): 11-18. doi: 10.3969/j.issn.1000-3983.2007.01.004
WANG Hongyu,SU Pengsheng,WANG Xiangheng. Comparing between 3D finite-element method and thermal-circuit method of calculating thermal-resistances in the thermal field of three-gorge hydrognerator[J]. Large Electric Machine and Hydraulic Turbine,2007(1): 11-18. (in Chinese) doi: 10.3969/j.issn.1000-3983.2007.01.004
|
| [24] |
陈志刚. 等效热网络法和有限元法在电机三维温度场计算中的应用与比较[C]//中国电工技术学会电气技术教育专业委员会学术年会论文集. 成都: 中国电工技术学会, 1994: 16-20.
|
| [25] |
商跃进. 有限元原理与ANSYS应用指南[M]. 北京: 清华大学出版社, 2005.
|
| [26] |
计光华, 计洪苗. 微流动及其元器件[M]. 北京: 高等教育出版社, 2009.
|
| [27] |
TAO Zhi,SUN Jiamian,LI Haiwang,et al. A radial-flux permanent magnet micromotor with 3D solenoid iron-core MEMS in-chip coils of high aspect ratio[J]. IEEE Electron Device Letters,2020,41(7): 1090-1093.
|
| [28] |
谭建成. 永磁无刷直流电机技术[M]. 北京: 机械工业出版社, 2011.
|
| [29] |
周凤争. 高速永磁无刷直流电机转子涡流损耗的研究[D]. 杭州: 浙江大学, 2008.
ZHOU Fengzheng. Investigation of rotor eddy-current loss in high-speed PM BLDC motors[D]. Hangzhou: Zhejiang University, 2008. (in Chinese)
|
| [30] |
朱卫光,张承宁,董玉刚. 大功率永磁同步电机转子永磁体损耗研究[J]. 电机与控制学报,2014,18(1): 33-37. doi: 10.3969/j.issn.1007-449X.2014.01.005
ZHU Weiguang,ZHANG Chengning,DONG Yugang. Rotor eddy current loss analysis of high power permanent magnet synchronous motor[J]. Electric Machines and Control,2014,18(1): 33-37. (in Chinese) doi: 10.3969/j.issn.1007-449X.2014.01.005
|
| [31] |
陈鹏,朱宪然,鱼振民. 开关磁阻电动机流场分析及风摩损耗计算[J]. 微特电机,2008,36(2): 20-23. doi: 10.3969/j.issn.1004-7018.2008.02.008
CHEN Peng,ZHU Xianran,YU Zhenmin. Flow simulation of switched reluctance motor and aerodynamic losses calculation[J]. Small & Special Electrical Machines,2008,36(2): 20-23. (in Chinese) doi: 10.3969/j.issn.1004-7018.2008.02.008
|
| [32] |
安忠良,吕顺. 高效永磁同步电动机空载杂散损耗计算及分析[J]. 微特电机,2015,43(8): 9-13. doi: 10.3969/j.issn.1004-7018.2015.08.003
AN Zhongliang,LÜ Shun. Analysis and calculation on no-load stray loss of high efficiency PMSM[J]. Small & Special Electrical Machines,2015,43(8): 9-13. (in Chinese) doi: 10.3969/j.issn.1004-7018.2015.08.003
|
| [33] |
沈启平. 车用高功率密度永磁同步电机的研究[D]. 沈阳: 沈阳工业大学, 2012.
SHEN Qiping. Study on high power density permanent magnet synchronous motor for electric vehicles application[D]. Shenyang: Shenyang University of Technology, 2012. (in Chinese)
|
| [34] |
李伟力,李守法,谢颖,等. 感应电动机定转子全域温度场数值计算及相关因素敏感性分析[J]. 中国电机工程学报,2007,27(24): 85-91. doi: 10.3321/j.issn:0258-8013.2007.24.016
LI Weili,LI Shoufa,XIE Ying,et al. Stator-rotor coupled thermal field numerical calculation of induction motors and correlated factors sensitivity analysis[J]. Proceedings of the CSEE,2007,27(24): 85-91. (in Chinese) doi: 10.3321/j.issn:0258-8013.2007.24.016
|
| [35] |
XYPTRAS J,HATZIATHANASSIOU V. Thermal analysis of an electrical machine taking into account the iron losses and the deep-bar effect[J]. IEEE Transactions on Energy Conversion,1999,14(4): 996-1003. doi: 10.1109/60.815019
|
| [36] |
徐天彤. 基于三维螺线管式电感的基于三维螺线管式电感的能量高效转换与控制研究[D]. 北京: 北京航空航天大学, 2019.
XU Tiantong. Research on energy efficient conversion and control based on three-dimensional solenoid inductor[D]. Beijing: Beijing University of Aeronautics and Astronautics, 2019. (in Chinese)
|
| [37] |
刘志宏. 小尺寸物体自然对流换热[D]. 北京: 清华大学, 1990.
LIU Zhihong. The natural convection heat transfer of small objects[D]. Beijing: Tsinghua University, 1990. (in Chinese)
|
| [38] |
TAKATO M, YOKOZEKI Y, MISHIMA K, et al. Design of electromagnetic induction type MEMS motor with multilayer ceramic three-dimensional coil[C]//2016 International Conference on Electronics Packaging. Piscataway, US: IEEE, 2016: 415-419.
|
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