| Citation: | LING Jie, PENG Hongtao, LI Yunqi, et al. Mathematical modeling of piezoelectric bimorph actuated force motor assembly for electrohydraulic servo valve[J]. Journal of Aerospace Power, 2025, 40(X):20250241 doi: 10.13224/j.cnki.jasp.20250241 |
Replacing the torque motor with a piezoelectric bimorph can improve electrohydraulic servo valve response, simplify the pilot stage, and enhance the stability. Yet existing actuator models fail to explain constraint effects on output. A mathematical model using piecewise and equivalent principles was developed. An equivalent actuator was designed for the jet-deflector stage, and tests under different constraints were conducted. Results showed that a 4 mm reduction in extension led to the largest static displacement decrease of 27.7 μm, the maximum dynamic resonance amplitude drop of 1.9 dB, and resonance frequency increase of 15.9%. A model including hysteresis, linear dynamics, and hydrodynamics was then built, with static/dynamic simulations validated against experiments. In static output, simulated hysteresis was 11.6% vs. experimental hysteresis 11.2% (RMS error 2.5 μm); in dynamic output at 600 Hz, the maximum RMS error was 5.7 μm, confirming the accuracy. This study can offer theoretical guidance for actuator design and optimization.
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