Abstract: A moving resource FEM model for analyzing the temperature and stress fields of EBW in titanium plate was set up.The welding residual stress distribution rules in 6 mm thickness plane were researched for the three kinds of welding parameters by means of numerical model and stress measurement.The results show that there exists the longitude tensile residual stress in a very narrow region of weld and welding heat-affected zone.The biggest longitude tensile residual stress approaches to the yield stress of titanium alloy.The welding technology will affect the stress distribution greatly.The technology,in which the EBW is proceeded on the surface firstly and then on the back surface,will improve the residual distribution obviously.The residual stress measurements prove the above conclusions.