螺线管线圈式MEMS永磁电动机的热分析

黄志平; 吴玉莹; 王文斌; 朱凯云; 吴瀚枭; 雷凯博; 徐天彤

doi:10.13224/j.cnki.jasp.20210678

螺线管线圈式MEMS永磁电动机的热分析

doi: 10.13224/j.cnki.jasp.20210678

北京航空航天大学航空发动机气动热力国家级重点实验室，北京 100191

基金项目: 航空发动机气动热力国家级重点实验室基金（6142702190509，6142702190510）；先进航空动力创新工作站（HKCX2020-02-015）

详细信息

作者简介:
黄志平（1992-），男，硕士生，主要从事超精密加工、机械制造研究

通讯作者:
徐天彤（1990-），男，助理研究员、硕士生导师，博士，主要从事航空发动机微系统研究。E-mail：xutiantong@buaa.edu.cn

中图分类号: V242.44
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出版历程
- 收稿日期: 2021-11-28
- 网络出版日期: 2023-07-28

Thermal analysis of a solenoid coil MEMS permanent-magnet motor

National Key Laboratory of Science and Technology on Aero-Engine Aero-thermodynamics， Beihang University，Beijing 100191，China

摘要

摘要:
针对一种螺线管线圈式MEMS（微机电系统）永磁电动机进行了热分析并给出了初步测温方案。介绍了此MEMS永磁电动机的总体设计方案，选用单晶硅衬底内二氧化硅绝缘的绕组达到散热性能优异的目的，利用ANSYS的稳态传热和静结构力学模块进行热固耦合模拟。在此基础上，通过数值模拟验证了电动机静子温度分布均匀，可将绕组和衬底视为无温度梯度。通过热固耦合模拟，得出不发生膨胀失配的最大工作温度为86 ℃和相应的最大发热损耗功率为2.83 W，据此预估电动机的额定工作性能，验证了本电动机的耐温能力和高功率密度潜力，最终设计的额定输出功率为0.362 W，计算的设计功率密度为0.117 W/g。
- 电动机热分析 /
- MEMS电动机 /
- 永磁电动机 /
- MEMS螺线管线圈 /
- 膨胀失配
Abstract:
A thermal analysis of a solenoid coil type MEMS permanent-magnet motor was conducted, and the preliminary temperature measurement plan was given. The overall design scheme of this MEMS permanent-magnet motor was introduced. The windings with silicon dioxide insulation inside the single crystal silicon substrate were selected to achieve the purpose of excellent heat dissipation performance. The thermal-structural coupling simulation was carried out by using the steady-state heat transfer and static structure mechanics modules of ANSYS. On this basis, it was verified by numerical simulation that the temperature distribution of the motor stator was uniform, and the winding and the substrate without temperature gradient can be considered. Through thermal-structural coupling simulation, it was concluded that the maximum operating temperature without expansion mismatch was 86 ℃ and the corresponding maximum heat loss power was 2.83 W. Based on this, the rated operating performance of the motor was estimated, and the temperature tolerance capacity and high power density potential of the motor were verified. The rated output power of the final design was 0.362 W, and the calculated design power density was 0.117 W/g.
- motor thermal analysis /
- MEMS motor /
- permanent-magnet motor /
- MEMS solenoid coil /
- expansion mismatch

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图 1 MEMS永磁电动机的结构示意图

1 驱动器印刷电路板（PCB）；2 静子；2-1 衬底；2-2 线圈绕组；2-3 铁芯；2-4 下衬底；3 转子；3-1 转轴；3-2 永磁体。

Figure 1. Structure diagram of MEMS permanent-magnet motor

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图 2 MEMS永磁电动机的衬底及线圈剖面图

1 铁芯；2 上表面铜导线；3 下表面铜导线；4 下衬底；5 上衬底。

Figure 2. Substrate and coil section of MEMS permanent-magnet motor

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图 3 MEMS永磁电动机的总体工艺和装配方案

a-1 静子衬底和绕组的加工；a-2 静子铁芯的加工；a-3 转子永磁体的加工；a-4 转子转轴的加工；b-1 静子装配；b-2 转子装配；c-1 静子与PCB的电连接；c-2 整机装配。

Figure 3. Overall fabrication and assembly scheme of MEMS permanent-magnet motor

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图 4 MEMS永磁电动机的传热表面分类

Figure 4. Convection surface classification of MEMS permanent-magnet motor

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图 5 MEMS永磁电动机的温度场分布

Figure 5. Temperature field distribution of MEMS permanent-magnet motor

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图 6 MEMS永磁电动机的热固耦合模拟结果

Figure 6. Thermal-structural coupling simulating results of MEMS permanent-magnet motor

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图 7 测温实验台概念图

Figure 7. Conceptual diagram of temperature measurement test bench

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表 1 MEMS永磁电动机的静子温度场模拟结果

Table 1. Temperature field simulating results of stator of MEMS permanent-magnet motor ℃

部件	最高温度	最低温度	平均温度
铁芯	95.192	93.046	93.839
绕组和衬底	96.568	95.282	96.32

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表 2 运行温升下电动机的静强度校核结果

Table 2. Static strength checking results of motor at operation temperature

部件	许用的最小安全系数	强度理论	最小安全系数
硅衬底	1.5	第一	1.7435
硅衬底	1.5	第二	1.6372
绕组	1	第三	1.0158
铁芯	1.2	第四	1.5557

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表 3 MEMS永磁电动机的设计额定性能

Table 3. Designed rated performance of MEMS permanent-magnet motor

参数	数值	参数	数值
额定工作温度/℃	86	额定输入功率/W	4.11
额定电压/V	3.34	额定铜损/W	3.52
额定电流/A	1.23	额定铁损/W	0.216
额定转速/（r/min）	10000	额定输出机械功率/W	0.362
额定转矩/（μN·m）	658.7

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表 4 本电动机设计性能与文献中电磁型微电动机的对比

Table 4. Designed performance comparison among of this motor and reported electro-magnetic micromotors

电动机来源	结构形式	线圈形式	静子直径×长度/ mm×mm	转矩/ （μN·m）	转矩电流比/ （μN·m/A）	输出机械功率/W
文献[11]	径向磁路开关磁阻式	发卡形平面线圈，含铁芯	ϕ1.5 （无轴向长度）	1.2 （计算值）
文献[12]	轴向磁路永磁式	平面螺旋形线圈，无铁芯	ϕ12.8×1.4		250
文献[14]	轴向磁路永磁式	平面螺旋形线圈，无铁芯	ϕ4×0.25	4.19×10⁻³		1.318×10⁻⁷
文献[38]	轴向磁路永磁式	三维螺线管式线圈，陶瓷芯	ϕ4.22×6.04
本文	径向磁路永磁式	三维螺线管式线圈，含铁芯	ϕ18×2	658.7	535.5	0.362

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