Micro high-speed bionic robot
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摘要:
基于尺寸为3.5 mm×3 mm×3 mm的微机电系统（micro-electro-mechanical-systems，MEMS）微型直线电动机，设计并制备了一种微型高速仿生机器人。该电动机推力系数达13 mN/A，兼具微尺度和大行程优势。设计了一种无连杆运动机构，简化机械结构，提高了运动效率与灵活性；采用由前腿、后腿与限位组成的三件式腿部结构，通过多参数耦合仿真优化出前腿、后腿与地面夹角分别为95°和80°的最佳角度组合。引入仿树蛙高摩擦表面，结构经聚二甲基硅氧烷（PDMS）软光刻复制后，摩擦因数提升2.5倍，且在湿润环境中衰减低于10%，显著增强了复杂环境中的抓地力与稳定性。整机尺寸为5 mm×5 mm×4 mm，质量为88 mg，在0.45 A、90 Hz的最佳驱动条件下，极限速度达每秒48倍体长，展现出优异的运动性能。
Abstract:A micro high-speed bionic robot was designed and fabricated based on a 3.5 mm×3 mm×3 mm micro-electro-mechanical-systems (MEMS) miniature linear motor. With a thrust coefficient of 13 mN/A, the motor had advantages of microscale dimensions and large stroke output. A linkage-free locomotion mechanism was developed to reduce the complexity of conventional transmission systems, enhancing the motion efficiency and flexibility. A three-part leg structure—composed of a front leg, a rear leg, and limiter—was implemented. Multi-parameter coupled simulations identified an optimal angle combination of angles between the front leg, the rear leg and the ground are 95° and 80° respectively. A high-friction surface inspired by tree frogs was introduced. Fabricated via polydimethylsiloxane (PDMS) soft lithography, the structure increased the friction coefficient by 2.5 times and exhibited less than 10% degradation under wet conditions, significantly improving the ground adhesion and stability in complex environments. With overall dimensions of 5 mm×5 mm×4 mm and a mass of 88 mg, the robot achieved a maximum speed of 48 body lengths per second, demonstrating outstanding locomotion performance under optimal operating conditions (0.45 A, 90 Hz).
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Key words:
- engine detection /
- micro robot /
- bionic structure /
- micro linear motor /
- motion mechanism /
- high speed movement
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图 9 带仿生表面的微型机器人电流-频率-速度关系
Figure 9. Current-frequency-speed relationship of micro robot with bionic surface
图 10 有无仿生表面微型机器人速度对比
Figure 10. Speed comparison of micro robot between with and without bionic surface
图 11 本文微型机器人的相对速度、体长与其他微型机器人以及自然界生物的对比
Figure 11. Comparison of this paper’s micro robot’s relative speed and body length with other micro robots and organisms in nature
表 1 不同前后腿角度下的运动距离
Table 1. Movement distance with different front and rear leg angles
mm α/（°） β/（°） 95 90 85 80 75 115 2.6 3.9 4.0 4.2 3.9 110 8.5 9.8 10.4 11.8 10.2 105 7.7 7.3 8.2 8.5 8.1 100 8.4 10.3 10.5 10.3 10.1 95 8.8 10.5 10.7 11.5 10.1 90 9.8 8.9 7.7 6.9 6.2 
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表 2 后腿摩擦因数与运动距离的关系
Table 2. Relationship between friction coefficient of rear leg and motion distance
后腿摩擦因数 运动距离/mm 0.2 5.9 0.4 9.4 0.6 13.8 0.8 14.2 1 15.1
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