Study on the inkjet printing manufacturing method of high-temperature thin-film sensors for turbine blades
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摘要:
相较于溅射沉积、离子束蒸发等薄膜制造方法，采用喷墨打印直写沉积原位制造三维曲面高温多层薄膜传感器线路更为简单高效。提出一种利用喷墨打印技术精准制造薄膜传感器的方法，探究了墨水特性、打印参数、烧结参数等因素对薄膜沉积质量的影响规律，获得了陶瓷及镍基合金基底上高质量、高性能的薄膜线路。对薄膜传感器进行室温至
1100 ℃的标定测试，其平均赛贝克系数为46.8 μV/℃，升降温段热电特性曲线的重复率为99.96%，测量误差为±0.21%。Abstract:Compared with methods such as sputter deposition and ion beam evaporation, inkjet printing offered a simpler and more efficient approach to directly deposit conformal multilayer high-temperature thin-film sensor circuits onto three-dimensional curved surfaces. A method for precisely manufacturing thin-film sensors using inkjet printing technology was proposed. The effects of nano-ink properties, as well as printing and sintering parameters, on the quality of film deposition were systematically investigated. Results demonstrated that high-quality, high-performance thin-film circuits can be successfully fabricated on ceramic or superalloy substrates. The thin-film sensor was calibrated up to
1100 ℃, with the mean Seebeck coefficient measured at 46.8 μV/℃. The repeatability of the fitted thermoelectric curves reached 99.96%, and temperature measurement error was ±0.21%. -
图 1 涡轮叶片高温薄膜传感器喷墨打印制造概念图
Figure 1. Schematic diagram of inkjet printing manufacturing for high-temperature thin-film sensors on turbine blades
图 2 薄膜传感器喷墨打印制造过程
Figure 2. Inkjet printing manufacturing process of thin-film sensors
图 6 不同烧结状态下ITO和In2O3薄膜的SEM图像和XRD图谱，打印参数为tw=140 ℃，Δx=Δy=0.04 mm，vp=10 mm/s
Figure 6. SEM images and XRD patterns of ITO and In2O3 films in different sintering states, with printing parameters of tw=140 ℃, Δx=Δy=0.04 mm, vp=10 mm/s
图 7 薄膜传感器热电特性测试结果
Figure 7. Test results of the thermoelectric properties of the thin-film sensor
表 1 有机和无机溶剂的物性参数和沉降速度
Table 1. Physical parameters and sedimentation rates of organic and inorganic solvents
溶剂 沸点/℃ 黏度/（${\text{mPa}} \cdot {\text{s}}$） 密度/（${\text{g}} / {\text{c}}{{\text{m}}^3}$） 表面张力/（${\text{mN}} / {{\text{m}}}$） 介电常数/$ （{{\text{C}}^2}/ （{\text{N}} \cdot {{\text{M}}^2}） ） $ 沉降速度/（${\text{nm/s}}$） 安全性 水 100 1.01 1.00 72.8 78.5 10.78 无毒性 甲醇 65 0.59 0.79 22.6 32.7 18.70 刺激性 乙醇 78 1.07 0.79 22.3 24.5 10.35 低毒性 乙二醇 197 17.66 1.11 46.5 37.0 0.60 无毒性 异丙醇 82 2.40 0.78 21.3 17.9 4.64 低毒性 正己醇 157 5.20 0.82 27.9 13.3 2.13 低毒性 甘油 291 56.00 1.26 61.9 56.2 0.18 低毒性 环己烷 81 0.89 0.78 24.4 1.2 12.50 刺激性 
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表 2 薄膜传感器热电特性曲线三次多项式拟合结果及其重复率
Table 2. Cubic polynomial fitting results of the thermoelectric characteristic curves of the thin-film sensor and their repeatability
三次多项式拟合 a/10−9 b/10−5 c e A/% 升温段拟合（3组测试结果） −2.78 2.22 0.0245 0.0124 99.97 降温段拟合（3组测试结果） −1.84 2.01 0.0258 0.0067 99.98 升降温拟合（6组测试结果） −2.35 2.12 0.0251 0.0134 99.96
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表 3 喷墨打印各步骤中的影响因素及其研究结果总结
Table 3. Summary of influencing factors and research findings for each step in inkjet printing
关键步骤 影响因素 主要研究结果 功能墨水制造 溶剂种类 乙二醇、异丙醇作为主、副溶剂可提升墨水稳定性及可打印性 溶剂比例 乙二醇和异丙醇质量比例范围为0.3～1.0时，Z值满足最佳打印区间 压电陶瓷波形 调整压电陶瓷波形可获得稳定、规则的球形墨滴 喷墨打印沉积 靶面温度 靶面温度影响咖啡环效应，均匀沉积的靶面温度为140 ℃ 打印横向点间距 点间距过大或过小导致线路间断或开裂，最佳点间距为0.04 mm 微粒薄膜烧结 热烧结温度 薄膜传感器塞贝克系数随烧结温度的增加而减小 激光烧结功率 薄膜传感器塞贝克系数随激光能量密度的增加而减小
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